A bulk-micromachined corner cube retroreflector with piezoelectric micro-cantilevers
نویسندگان
چکیده
منابع مشابه
Polarization conversion cube-corner retroreflector.
Polarization conversion cube-corner retroreflectors rotate the major axis of the incident electric field by 90°. We show that polarization conversion cube-corner retroreflectors cannot be created with isotropic reflecting surfaces, but can be created by incorporating nonisotropic reflecting surfaces. Two types are considered-cube corners with surfaces having elliptical eigenstates and cube corn...
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Volume Bragg gratings serve an important role in laser development as devices that are able to manipulate both the wavelength and angular spectrum of light. A common method for producing gratings is holographic recording of a two collimated beam interference pattern in a photosensitive material. This process requires stability of the recording system at a level of a fraction of the recording wa...
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Optical sensors for detecting temperature and strain play a crucial role in the analysis of environmental conditions and real-time remote sensing. However, the development of a single optical device that can sense temperature and strain simultaneously remains a challenge. Here, a flexible corner cube retroreflector (CCR) array based on passive dual optical sensing (temperature and strain) is de...
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Bulk micromachined piezoresistive pressure sensor was designed, fabricated, packaged, and tested at RIT laboratory facility. Every aspect of the fabrication is studied thoroughly and used as an educational tool in better understanding the fabrication of MEMs devices.
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We have examined both experimentally and theoretically a piezoelectric unimorph cantilever as a liquid viscosity-and-density sensor. The fabricated piezoelectric unimorph consisted of a PbO•ZrO2•TiO2 ~PZT! layer on a thin stainless-steel plate. In addition to a driving electrode, a sensing electrode was placed on top of the PZT layer, permitting the direct measurement of the resonance frequency...
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ژورنال
عنوان ژورنال: Micro and Nano Systems Letters
سال: 2013
ISSN: 2213-9621
DOI: 10.1186/2213-9621-1-7